Rapid Prototyping of Nanofluidic Slits in a Silicone Bilayer
| Autor: | James Alexander Liddle, Thomas P. Kole, Anatoly Dritschilo, Jason G. Kralj, Kuo-Tang Liao, Samuel M. Stavis, Elizabeth A. Strychalski, Daniel Schiffels, Bojan R. Ilic |
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| Jazyk: | angličtina |
| Rok vydání: | 2015 |
| Předmět: |
Rapid prototyping
replica Materials science nanofluidic nanoparticle Microfluidics prototyping General Engineering microfluidic silicon Context (language use) Nanotechnology Substrate (printing) DNA Photoresist Article chemistry.chemical_compound Silicone Nanolithography chemistry silicone Photomask molding SU-81 device |
| Zdroj: | Journal of Research of the National Institute of Standards and Technology |
| ISSN: | 2165-7254 1044-677X |
| Popis: | This article reports a process for rapidly prototyping nanofluidic devices, particularly those comprising slits with microscale widths and nanoscale depths, in silicone. This process consists of designing a nanofluidic device, fabricating a photomask, fabricating a device mold in epoxy photoresist, molding a device in silicone, cutting and punching a molded silicone device, bonding a silicone device to a glass substrate, and filling the device with aqueous solution. By using a bilayer of hard and soft silicone, we have formed and filled nanofluidic slits with depths of less than 400 nm and aspect ratios of width to depth exceeding 250 without collapse of the slits. An important attribute of this article is that the description of this rapid prototyping process is very comprehensive, presenting context and details which are highly relevant to the rational implementation and reliable repetition of the process. Moreover, this process makes use of equipment commonly found in nanofabrication facilities and research laboratories, facilitating the broad adaptation and application of the process. Therefore, while this article specifically informs users of the Center for Nanoscale Science and Technology (CNST) at the National Institute of Standards and Technology (NIST), we anticipate that this information will be generally useful for the nanofabrication and nanofluidics research communities at large, and particularly useful for neophyte nanofabricators and nanofluidicists. |
| Databáze: | OpenAIRE |
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