Micromachined silicon plates for sensing molecular interactions
| Autor: | Jeffrey T. Borenstein, Marc S. Weinberg, Christopher E. Dubé, Edwin T. Carlen, Angela M. Zapata |
|---|---|
| Rok vydání: | 2006 |
| Předmět: |
Materials science
Physics and Astronomy (miscellaneous) Silicon Surface stress IR-63729 chemistry.chemical_element Nanotechnology Bending of plates EWI-8351 chemistry BIOS-Nanosensors Chemisorption Phase (matter) Monolayer Crystalline silicon sense organs Composite material Layer (electronics) METIS-237672 |
| Zdroj: | Applied physics letters, 89(10/17):10.1063/1.2364878. American Institute of Physics |
| ISSN: | 0003-6951 |
| DOI: | 10.1063/1.2364878. |
| Popis: | A micromachined surface stress sensor based on a thin suspended crystalline silicon circular plate measures differential surface stress changes associated with vapor phase chemisorption of an alkanethiol self-assembled monolayer. The isolated face of the suspended silicon plate serves as the sensing surface treated with a receptor layer sensitive to a target molecule, in this case Au(111). Chemisorption of an alkanethiol on the gold coated silicon surfaces results in plate bending. Plate displacements, measured with a phase scanning interferometer, indicate a differential surface stress change $\Delta \sigma_s$=-0.72 +/- 0.02 N m(-1) for 1-dodecanethiol. |
| Databáze: | OpenAIRE |
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