Effect of substrate temperature and Ga source precursor on growth and material properties of GaN grown by hollow cathode plasma assisted atomic layer deposition
| Autor: | Shahid Ali Leghari, Mustafa Alevli, Necmi Biyikli, Ali Haider, Nese Gungor, Oleksandr Tsymbalenko, Piter Deminskyi, Seda Kizir |
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| Přispěvatelé: | Bıyıklı, Necmi |
| Rok vydání: | 2016 |
| Předmět: |
Atoms
Cathodes Materials science X ray diffraction Thin films X ray photoelectron spectroscopy Analytical chemistry Pulsed laser deposition Hollow cathodes 02 engineering and technology Substrate (electronics) 01 natural sciences GaN law.invention Atomic layer deposition chemistry.chemical_compound Triethyl galliums X-ray photoelectron spectroscopy law Substrate temperature 0103 physical sciences Nanotechnology Triethylgallium Trimethylgallium Thin film Deposition Electrodes 010302 applied physics Low temperature growth Optical properties Substrates Structural and optical properties Temperature Gallium alloys Gallium nitride Plasma 021001 nanoscience & nanotechnology Cathode chemistry Film growth Different substrates 0210 nano-technology Grazing incidence x-ray diffraction Electron sources |
| Zdroj: | 2016 IEEE 36th International Conference on Electronics and Nanotechnology (ELNANO) |
| DOI: | 10.1109/elnano.2016.7493030 |
| Popis: | Date of Conference: 19-21 April 2016 GaN thin films grown by hollow cathode plasma-assisted atomic layer deposition (HCPA-ALD) at two different substrate temperatures (250 and 450 °C) are compared. Effect of two different Ga source materials named as trimethylgallium (TMG) and triethylgallium (TEG) on GaN growth and film quality is also investigated and reviewed. Films were characterized by X-ray photoelectron spectroscopy, spectroscopic ellipsometery, and grazing incidence X-ray diffraction. GaN film deposited by TMG revealed better structural, chemical, and optical properties in comparison with GaN film grown with TEG precursor. When compared on basis of different substrate temperature, GaN films grown at higher substrate temperature revealed better structural and optical properties. |
| Databáze: | OpenAIRE |
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