Direct detection of polystyrene equivalent nanoparticles with diameter of 21 nm (∼λ/19) using coherent Fourier scatterometry: erratum

Autor: D. Kolenov, I. E. Zadeh, R. C. Horsten, S. F. Pereira
Rok vydání: 2022
Předmět:
Zdroj: Optics express. 30(16)
ISSN: 1094-4087
Popis: We present an erratum to our article Kolenov, D., et al. “Direct detection of polystyrene equivalent nanoparticles with a diameter of 21 nm ( ∼ λ/19) using coherent Fourier scatterometry.” Opt. Express 29, 16487 (2021)10.1364/OE.421145.
Databáze: OpenAIRE