Design, implementation, and control of a six-axis compliant stage
| Autor: | J.H. Kim, James Schmiedeler, Kaixuan Hu, Chia-Hsiang Menq |
|---|---|
| Rok vydání: | 2008 |
| Předmět: |
Physics
White light interferometry business.industry Amplifier Transducers Compliant mechanism Reproducibility of Results Equipment Design Robotics Kinematics Visual servoing Motion control Sensitivity and Specificity Metrology Equipment Failure Analysis Micromanipulation Motion Optics Nanotechnology business Instrumentation Rotation (mathematics) |
| Zdroj: | Review of Scientific Instruments. 79:025105 |
| ISSN: | 0034-6748 |
| Popis: | This paper presents the development of a new compact six-axis compliant stage employing piezoelectric actuators to achieve six-axis actuation with nanometer resolution. The integration of direct metrology in the object space, based on real-time visual feedback, enables high-precision motion control. In order to achieve greater motion range, the simple and compact decoupled mechanical structure utilizes two-tap displacement amplifiers for in-plane motion and semibridge amplifiers for out-of-plane motion. The kinematic analysis of the stage is presented. Laterally sampled white light interferometry was implemented to measure the out-of-plane motion of the stage, and a measurement model associated with the designed target patterns is developed to estimate the in-plane motion in real time. Together, they form a visual tracking system and are integrated with the six-axis compliant stage to realize precision six-axis real-time visual servo-control. Experimental results demonstrate that the six-axis compliant stage has the motion range of 77.42 microm, 67.45 microm, 24.56 microm, 0.93 mrad, 0.95 mrad, and 3.10 mrad, and the resolution of +/-5 nm, +/-8 nm, +/-10 nm, +/-10 murad, +/-10 murad, and +/-20 murad for x-axis, y-axis, and z-axis translation and rotation, respectively. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|