Contact Position Microsensors with Travel Ranges between 50μm and 2mm
| Autor: | Assen Shulev, G. Stavreva, Vladimir Stavrov |
|---|---|
| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Microelectromechanical systems Engineering business.industry Bandwidth (signal processing) Electrical engineering Linearity 02 engineering and technology General Medicine Mems sensors 021001 nanoscience & nanotechnology 01 natural sciences Power supply voltage 0103 physical sciences Contact position Contact mode 0210 nano-technology business Engineering(all) Position sensor |
| Zdroj: | Procedia Engineering. 168:794-797 |
| ISSN: | 1877-7058 |
| DOI: | 10.1016/j.proeng.2016.11.268 |
| Popis: | Thorough investigation of the research done in the field of commercially available precise linear position sensors has revealed a certain gap in the travel range of 10μm to 2mm. In order to expand the scope of previous work on MEMS with sidewall embedded piezoresistors, this paper presents several contact mode position sensors within the same travel range. One goal of the current paper is to demonstrate the applicability and advantages of MEMS with embedded flexures and sidewall piezoresistors for precise position monitoring. Another goal is to optimize the sensor signals providing a trade-off between various parameters such as: sensitivity, linearity, travel range, and resonance frequency/bandwidth of the devices. Since those sensors might have various applications, in this paper some experimental results from seven sensors having different travel ranges and dynamic characteristics are reported. Particularly, the experimentally measured sensitivities in the range between 50μV/μm and 5mV/μm @1VDC power supply are presented. Also, raw sensor signals with magnitudes of 10% to 28% of the power supply voltage have been observed. |
| Databáze: | OpenAIRE |
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