Sensitivity and temperature behavior of a novelz-axis differential resonant micro accelerometer
| Autor: | Alberto Corigliano, Claudia Comi, Giacomo Langfelder, Sarah Zerbini, Valentina Zega |
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| Rok vydání: | 2016 |
| Předmět: |
Offset (computer science)
Materials science resonant accelerometer 02 engineering and technology Accelerometer 01 natural sciences Resonator Optics Electronic medicine Optical and Magnetic Materials Electrical and Electronic Engineering Microelectromechanical systems business.industry Mechanical Engineering 010401 analytical chemistry Electrical engineering Stiffness Linearity torsional resonators 021001 nanoscience & nanotechnology MEMS Mechanics of Materials Electronic Optical and Magnetic Materials 0104 chemical sciences Surface micromachining medicine.symptom 0210 nano-technology business DC bias |
| Zdroj: | Journal of Micromechanics and Microengineering. 26:035006 |
| ISSN: | 1361-6439 0960-1317 |
| DOI: | 10.1088/0960-1317/26/3/035006 |
| Popis: | The present work concerns the operating principle and a thorough experimental characterization of a new polysilicon resonant micro accelerometer for out-of-plane measurements, fabricated using an industrial surface micromachining technique. This device is characterized by differential resonant sensing, obtained from the variation of the electrostatic stiffness of two torsional resonators under the application of an external acceleration. The sensitivity, defined as the differential shift in resonance frequencies per gravity unit (lg = 9.8 m s−2), is of about 10 Hz g−1when operated at a DC bias of 1.5 V only. Over an acceleration range larger than 10 g, the deviation from linearity is lower than 1% and the cross-axis rejection is larger than 34 dB. The resonators temperature coefficients of frequency, in the order of −29 ppm C−1, are matched within about 0.1%, resulting in linear offset drifts against temperature lower than 5 mg up to 95 C in absence of any digital compensation. |
| Databáze: | OpenAIRE |
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