Influence of experimental parameters on secondary ion yield for MeV-SIMS
Autor: | Ivančica Bogdanović Radović, Zdravko Siketić, Milko Jakšić, Valentin Stoytschew |
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Jazyk: | angličtina |
Rok vydání: | 2017 |
Předmět: |
Nuclear and High Energy Physics
Work (thermodynamics) Reproducibility Ion beam analysis 060102 archaeology Chemistry Ion yield 010401 analytical chemistry yield MeV SIMS ion beam analysis 06 humanities and the arts Mass spectrometry 01 natural sciences 0104 chemical sciences Computational physics Ion Yield (chemistry) Surface roughness 0601 history and archaeology Atomic physics Instrumentation |
DOI: | 10.1016/j.nimb.2017.01.022 |
Popis: | Megaelectronvolt-Secondary Ion Mass Spectrometry (MeV-SIMS) is an emerging ion beam analysis technique for molecular speciation and submicrometer imaging. Following the construction of different experimental setups a systematic investigation on the dependence of secondary ion yields on experimental parameters is crucial. Without this knowledge, results are hard to interpret as surface roughness, scan size and the position on the sample can influence the secondary ion count and misleading images can be obtained. Additionally, to achieve better reproducibility the optimal experimental conditions need to be well known. In this work, we present the results of investigations into the influence of the main experimental parameters on the secondary ion yield. |
Databáze: | OpenAIRE |
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