Laser-assisted ECR-plasma-CVD of a-C:H films
| Autor: | Sergej M. Pimenov, Elena D. Obraztsova, V. G. Ralchenko, M. Ozegowski, S.M. Metev, K. B. Meteva, A.A. Smolin, Vitali I. Konov, Taras V. Kononenko, Gerd Sepold |
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| Předmět: |
Excimer laser
Chemistry Mechanical Engineering medicine.medical_treatment Analytical chemistry General Chemistry Indentation hardness Electron cyclotron resonance Electronic Optical and Magnetic Materials law.invention symbols.namesake Plasma-enhanced chemical vapor deposition law Materials Chemistry medicine symbols Irradiation Electrical and Electronic Engineering Thin film Crystallization Raman spectroscopy |
| Zdroj: | Scopus-Elsevier |
| Popis: | UV laser irradiation has been found to influence significantly the growth process of a-C:H films and to result in a modification of the film properties. Up to 2 μm thick, defect-free films have been synthesized. The optical and mechanical film properties are changed as a function of the laser energy density. Especially noteworthy is a significant increase in the film microhardness. At 60 GPa it reaches a value which is twice as high as that observed for unirradiated films. The laser-induced structural transformations in a-C:H films have been studied by Raman spectroscopy. |
| Databáze: | OpenAIRE |
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