The laser ablation as a perspective technique for the deposition of metal-silicide nanoparticles in situ embedded in PECVD of Si:H thin films

Autor:	The Ha Stuchlikova, Radek Fajgar, Martin Kostejn, Vladislav Drinek, Zdenek Remes, Jiri Stuchlik
Rok vydání:	2015
Předmět:	Laser ablation Materials science business.industry Nanoparticle Electroluminescence Magnesium silicide Silane Amorphous solid chemistry.chemical_compound chemistry Plasma-enhanced chemical vapor deposition Optoelectronics sense organs Thin film business
Zdroj:	JJAP Conference Proceedings. 3:011302-011302
ISSN:	2758-2450
Popis:	In this paper we introduce amorphous hydrogenated silicon thin films (a-Si:H) deposited by PECVD with embedded magnesium silicide (Mg2Si) nanoparticles (NPs) which are created by Reactive Laser Ablation (RLA) of Mg target in low pressure of silane (SiH4). Both techniques are periodically changed in short intervals – each of the monolayers of Mg2Si NPs is covered by thin a-Si:H film. The physical characteristics of those films are studied not only on high quality optical substrates but in diode structures too. As a final result we introduce the voltage dependence of the electroluminescence of deposited diodes.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::95ae9b52d9b0f712accebb3bd59fb750 https://doi.org/10.56646/jjapcp.3.0_011302 Zobrazit plný text záznamu