Effect of pulsed methane gas flow on the incorporation of phosphorous in diamond

Autor: V. Mortet, A. Taylor, M. Davydova, M. Lamač, N. Lambert, I. Elantyev, J. Lorinčík, D. Troadec, M. Vronka, S. Potocký
Přispěvatelé: Institute of Physics of the Czech Academy of Sciences (FZU / CAS), Czech Academy of Sciences [Prague] (CAS), Czech Technical University in Prague (CTU), CHU Trousseau [APHP], Assistance publique - Hôpitaux de Paris (AP-HP) (AP-HP)-Sorbonne Université (SU), Sorbonne Université - Faculté de Médecine (SU FM), Sorbonne Université (SU), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA), Université catholique de Lille (UCL)-Université catholique de Lille (UCL), Centrale de Micro Nano Fabrication - IEMN (CMNF - IEMN), Université catholique de Lille (UCL)-Université catholique de Lille (UCL)-Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA), The financial support from the following sources is gratefully acknowledged: the Czech Science Foundation grant ID: GACR 21-03538S, the SGS Student Grant ID: SGS21/057/OHK3/1T/13, and the Operational Program Research, Development, and Education financed by European Structural and Investment Funds and the Czech Ministry of Education, Youth and Sports (projects SOLID21 - CZ.02.1.01/0.0/0.0/16_019/0000760). We also acknowledge the CzechNanoLab Research Infrastructure supported by the Czech Ministry of Education, Youth and Sports (LM2018110)., Renatech Network, CMNF, Centre de l'Asthme et des Allergies [CHU Trousseau], Assistance publique - Hôpitaux de Paris (AP-HP) (AP-HP)-CHU Trousseau [APHP], Assistance publique - Hôpitaux de Paris (AP-HP) (AP-HP)
Jazyk: angličtina
Rok vydání: 2022
Předmět:
Zdroj: Diamond and Related Materials
Diamond and Related Materials, 2022, 124, pp.108928. ⟨10.1016/j.diamond.2022.108928⟩
Diamond and Related Materials, Elsevier, 2022, 124, pp.108928. ⟨10.1016/j.diamond.2022.108928⟩
ISSN: 0925-9635
Popis: International audience; The synthesis of n-type phosphorus-doped diamond is essential for the development of diamond-based bipolar devices. Although demonstrated 20 years ago, it remains a complex problem due to low incorporation efficiency and low maximum concentrations. Previous works showed the deleterious influence of methinophosphide formation in a methane/hydrogen/phosphine plasma on the growth of phosphorous doped diamond using the chemical vapor deposition method. In this work, we investigate the effect of pulsing methane during microwave plasma enhanced chemical vapor deposition to avoid the formation of HCP and to increase phosphorus incorporation efficiency and maximum concentration in diamond.
Databáze: OpenAIRE
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