A self-assembled synthesis of carbon nanotubes for interconnects
| Autor: | Guichuan Cao, Zexiang Chen, Zulun Lin, Irmgard Koehler, Peter K. Bachmann |
|---|---|
| Rok vydání: | 2006 |
| Předmět: |
Materials science
Scanning electron microscope Mechanical Engineering Conductance Bioengineering Nanotechnology General Chemistry Substrate (electronics) Chemical vapor deposition Carbon nanotube Integrated circuit Ion source law.invention Mechanics of Materials law Perpendicular General Materials Science Electrical and Electronic Engineering |
| Zdroj: | Nanotechnology. 17:1062-1066 |
| ISSN: | 1361-6528 0957-4484 |
| DOI: | 10.1088/0957-4484/17/4/036 |
| Popis: | We report a novel approach to grow highly oriented, freestanding and structured carbon nanotubes (CNTs) between two substrates, using microwave plasma chemical vapour deposition. Sandwiched, multi-layered catalyst structures are employed to generate such structures. The as-grown CNTs adhere well to both the substrate and the top contact, and provide a low-resistance electric contact between the two. High-resolution scanning electron microscope (SEM) images show that the CNTs grow perpendicular to these surfaces. This presents a simple way to grow CNTs in different, predetermined directions in a single growth step. The overall resistance of a CNT bundle and two CNT-terminal contacts is measured to be about 14.7 k Ω. The corresponding conductance is close to the quantum limit conductance G(0). This illustrates that our new approach is promising for the direct assembly of CNT-based interconnects in integrated circuits (ICs) or other micro-electronic devices. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|