Giant Wrinkles on the Surface of Epitaxial BaTiO3 Thin Films with Drastic Shrinkage during Transfer from a MgO(100) Single-Crystal Substrate to a Flexible Polyethylene Terephthalate Sheet
| Autor: | Shinji Umatani, Tomofumi Mizuyama, Akihiro Hiraoka, Hiroaki Nishikawa, Katsuhiro Mikami |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2021 |
| Předmět: |
BaTiO3
Materials science Fabrication Substrate (electronics) TP1-1185 Epitaxy Biochemistry Analytical Chemistry transfer process chemistry.chemical_compound flexible device Polyethylene terephthalate giant wrinkle Electrical and Electronic Engineering Composite material Thin film Instrumentation Communication Chemical technology Ferroelectricity Exfoliation joint Atomic and Molecular Physics and Optics shrinkage chemistry Layer (electronics) |
| Zdroj: | Sensors, Vol 21, Iss 7326, p 7326 (2021) Sensors (Basel, Switzerland) |
| ISSN: | 1424-8220 |
| Popis: | The transfer of ferroelectric and piezoelectric BaTiO3 epitaxial thin films from an original MgO(100) single-crystal substrate to a polyethylene terephthalate (PET) sheet has been studied to fabricate flexible epitaxial functional oxides. The outline of our previous transfer process is as follows: the epitaxial BaTiO3 thin films were deposited on the MgO(100). Then, the surface of the BaTiO3 was adhered onto a PET sheet. Finally, only the MgO(100) substrate was dissolved in a phosphoric aqueous solution, which resulted in the transfer of the epitaxial BaTiO3 thin film from the MgO(100) to a PET sheet. To establish this transfer process, our aim was to prevent any damage, such as cracks and exfoliation, during the transfer of the epitaxial functional oxides. We found that a Pt buffer layer with a ductile nature was effective for improving the quality of transferred epitaxial BaTiO3 thin films. Moreover, the epitaxial BaTiO3 thin films showed a drastic shrinkage of ca. 10%. The surfaces of the shrunk, epitaxial BaTiO3 thin films showed giant wrinkles with a micrometer-order amplitude and a 10-μm-order periodicity without any damage. The epitaxial BaTiO3 thin films with giant wrinkles, accompanied by drastic shrinkage, are similar to the thin films that are coated on a pre-stretched elastomer, which is one of the fabrication processes of stretchable devices. |
| Databáze: | OpenAIRE |
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