A 130nm 1Mb Embedded Phase Change Memory with 500kb/s Single Channel Write Throughput

Autor: Chen Yifeng, Ding Sheng, Chen Xiao-Gang, Zhong Ming, Feng Gao-Ming, Xie Zhifeng, Wang Qian, Cai Daolin, Chen Houpeng, Song Zhi-Tang, Xu Chen, WU Guanpin
Rok vydání: 2011
Předmět:
Zdroj: Procedia Engineering. 16:198-203
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2011.08.1072
Popis: A 130 nm 1Mb embedded phase change memory (PCM) has been achieved, requiring only three additional masks for phase change storage element, featuring 500 kb/s single channel write throughput and > 10 8 endurance. The prepare process has been optimized to reduce the cost and power. An 80 nm heat electrode has been prepared with 130 nm process. The optimal Read/Write circuit module is designed to realize the load/store function for PCM. The critical operation parameter is Reset/70 ns/2.5 mA and Set/1500 ns/1 mA, which means that the signal channel write throughput arrives to 500 kb/s.
Databáze: OpenAIRE