Coincidence Detection of EELS and EDX Spectral Events in the Electron Microscope

Autor: Jo Verbeeck, Armand Béché, Knut Müller-Caspary, Daen Jannis
Jazyk: angličtina
Rok vydání: 2021
Předmět:
time correlation
Technology
Materials science
Silicon drift detector
QH301-705.5
QC1-999
Energy-dispersive X-ray spectroscopy
electron energy-loss spectroscopy
02 engineering and technology
01 natural sciences
Signal
law.invention
Time of arrival
Optics
law
0103 physical sciences
transmission electron microscopy
energy dispersive X-ray spectroscopy
General Materials Science
Biology (General)
QD1-999
Instrumentation
010302 applied physics
Fluid Flow and Transfer Processes
single event detection
business.industry
Physics
Process Chemistry and Technology
Electron energy loss spectroscopy
Resolution (electron density)
Detector
General Engineering
Engineering (General). Civil engineering (General)
021001 nanoscience & nanotechnology
Computer Science Applications
Chemistry
TA1-2040
Electron microscope
0210 nano-technology
business
ddc:600
Zdroj: Applied Sciences
Volume 11
Issue 19
Applied Sciences, Vol 11, Iss 9058, p 9058 (2021)
Applied Sciences 11(19), 9058-(2021). doi:10.3390/app11199058
ISSN: 2076-3417
DOI: 10.3390/app11199058
Popis: Recent advances in the development of electron and X-ray detectors have opened up the possibility to detect single events from which its time of arrival can be determined with nanosecond resolution. This allows observing time correlations between electrons and X-rays in the transmission electron microscope. In this work, a novel setup is described which measures individual events using a silicon drift detector and digital pulse processor for the X-rays and a Timepix3 detector for the electrons. This setup enables recording time correlation between both event streams while at the same time preserving the complete conventional electron energy loss (EELS) and energy dispersive X-ray (EDX) signal. We show that the added coincidence information improves the sensitivity for detecting trace elements in a matrix as compared to conventional EELS and EDX. Furthermore, the method allows the determination of the collection efficiencies without the use of a reference sample and can subtract the background signal for EELS and EDX without any prior knowledge of the background shape and without pre-edge fitting region. We discuss limitations in time resolution arising due to specificities of the silicon drift detector and discuss ways to further improve this aspect.
Databáze: OpenAIRE