Contactless device for the fast conductivity characterization of a large range semiconductors
| Autor: | Y. Le Bihan, Denis Mencaraglia, Florent Loete |
|---|---|
| Přispěvatelé: | Laboratoire Génie électrique et électronique de Paris (GeePs), Université Paris-Sud - Paris 11 (UP11)-Université Pierre et Marie Curie - Paris 6 (UPMC)-CentraleSupélec-Centre National de la Recherche Scientifique (CNRS) |
| Jazyk: | angličtina |
| Rok vydání: | 2016 |
| Předmět: |
Materials science
semiconductor materials electromagnetic model conductivity measurement range Conductivity broadband multicarrier test signal 01 natural sciences law.invention fast transient conditions crystalline silicon wafers transport properties law Hardware_INTEGRATEDCIRCUITS Eddy current Wafer Reflectometry contactless conductivity measurement system Electrical impedance coil-wafer interaction reflectometry business.industry System of measurement eddy current probe 010401 analytical chemistry generic apparatus Electrical engineering transmission line 0104 chemical sciences contactless method [SPI.ELEC]Engineering Sciences [physics]/Electromagnetism Semiconductor Electromagnetic coil Optoelectronics semiconductor wafer business |
| Zdroj: | International Symposium on Semiconductor Manufacturing (ISSM 2016) International Symposium on Semiconductor Manufacturing (ISSM 2016), Dec 2016, Tokyo, Japan. 4p., ⟨10.1109/issm.2016.7934522⟩ |
| DOI: | 10.1109/issm.2016.7934522⟩ |
| Popis: | International audience; We report on the development and application of a brand-new contactless method based on eddy currents with a view to designing a generic apparatus for the characterization of some transport properties of a large range of semiconductors. The eddy current probe, constituted of a coil connected to a transmission line, interacts with the semiconductor wafer under inspection. The innovative approach of this work consists in measuring the impedance of the coil by reflectometry using a broadband multicarrier test signal, i.e. containing multiple frequencies. An electromagnetic model of the coil-wafer interaction is then used to estimate the conductivity of the wafer. This process results in a new contactless conductivity measurement system that exhibits a very wide conductivity measurement range and allows the characterization of a large variety of semiconductor materials. The device is also very fast potentially allowing the measurement of transport properties of semiconductors in fast transient conditions. As a practical example, the performance of our device is demonstrated by estimating the conductivity of a set of crystalline silicon wafers. |
| Databáze: | OpenAIRE |
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