Nondestructive Femtosecond Laser Lithography of Ni Nanocavities by Controlled Thermo-Mechanical Spallation at the Nanoscale
| Autor: | Vadim P. Veiko, Evgeny Modin, Dmitry S. Ivanov, Alexandr Alekhin, Alexey M. Lomonosov, Paolo Vavassori, Vasily V. Temnov, A. A. Samokhvalov |
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| Přispěvatelé: | Institut des Molécules et Matériaux du Mans (IMMM), Le Mans Université (UM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), National Research University of Information Technologies, Mechanics and Optics [St. Petersburg] (ITMO), A. M. Prokhorov General Physics Institute (GPI), Russian Academy of Sciences [Moscow] (RAS), CICNanoGUNE |
| Jazyk: | angličtina |
| Rok vydání: | 2020 |
| Předmět: |
Materials science
genetic structures Magnetism Physics::Optics FOS: Physical sciences Bioengineering 02 engineering and technology Applied Physics (physics.app-ph) 7. Clean energy Fluence law.invention [SPI]Engineering Sciences [physics] law Mesoscale and Nanoscale Physics (cond-mat.mes-hall) General Materials Science Spallation [NLIN]Nonlinear Sciences [physics] Lithography [PHYS]Physics [physics] Condensed Matter - Materials Science Laser ablation Condensed Matter - Mesoscale and Nanoscale Physics business.industry Mechanical Engineering Materials Science (cond-mat.mtrl-sci) General Chemistry Physics - Applied Physics 021001 nanoscience & nanotechnology Condensed Matter Physics Laser eye diseases Femtosecond Optoelectronics sense organs 0210 nano-technology business Maskless lithography Optics (physics.optics) Physics - Optics |
| Zdroj: | Nano Letters Nano Letters, American Chemical Society, 2020, ⟨10.1021/acs.nanolett.0c02574⟩ |
| ISSN: | 1530-6984 1530-6992 |
| DOI: | 10.1021/acs.nanolett.0c02574⟩ |
| Popis: | We present a new approach to femtosecond direct laser writing lithography to pattern nanocavities in ferromagnetic thin films. To demonstrate the concept we irradiated 300~nm thin nickel films by single intense femtosecond laser pulses through the glass substrate and created complex surface landscapes at the nickel-air interface. Using a fluence above the ablation threshold the process is destructive and irradiation leads to the formation of 200~nm thin flakes of nickel around the ablation crater as seen by electron microscopy. By progressively lowering the peak laser fluence, slightly below the ablation threshold the formation of closed spallation cavities is demonstrated by interferometric microscopy. Systematic studies by electron and optical interferometric microscopies enabled us to gain an understanding of the thermo-mechanical mechanism leading to spallation at the solid-molten interface, a conclusion supported by molecular dynamics simulations. We achieved a control of the spallation process that enabled the fabrication of closed spallation nanocavities and their periodic arrangements. Due to their topology closed magnetic nanocavities can support unique couplings of multiple excitations (magnetic, optical, acoustic, spintronic). Thereby, they offer a unique physics playground, before unavailable, for magnetism, magneto-photonic and magneto-acoustic applications. 4 figures |
| Databáze: | OpenAIRE |
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