Autonomous calibration method of the reference flat surface of an interferometer without using a standard flat surface

Autor:	Toshiyuki Takatsuji, Kunitoshi Nishimura, Min Young Kim, Ikumatsu Fujimoto
Rok vydání:	2012
Předmět:	Physics Flat surface business.industry Residual Atomic and Molecular Physics and Optics Interferometry Optics Square root Calibration Electrical and Electronic Engineering business Engineering (miscellaneous) Image resolution Uncertainty analysis
Zdroj:	Applied Optics. 51:4754
ISSN:	2155-3165 1559-128X
DOI:	10.1364/ao.51.004754
Popis:	An autonomous method for calibrating the reference flat surface of an interferometer is proposed with the uncertainty analysis. The method consists of three phases; the first step is multiple rotating shifts of a specimen, the second is a linear shift, and the last is multiple rotating shifts again. The profile of the reference flat surface is basically determined by the linear shift. The linear shift errors that occurred during the linear shift are identified by the rotating shifts. The rotating shift errors caused by the rotating shifts can be compensated and the residual uncertainty can be reduced in proportion to the square root of the number of rotating shifts per one revolution. Finally, the uncertainty analysis is carried out in detail.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::92a1928c746542ba72ebd09f2029a268 https://doi.org/10.1364/ao.51.004754 Zobrazit plný text záznamu