Interfacial Structure and Electrical Properties of Transparent Conducting ZnO Thin Films on Polymer Substrates

Autor: Seul Gi Seo, Yong Soo Cho, Young Soo Lim, Hyung Ho Park, Won Seon Seo, Bo Bae Kim, Hyoung Seuk Choi, Jong Ho Kang, Dae Wook Kim
Rok vydání: 2013
Předmět:
Zdroj: Microscopy and Microanalysis. 19:131-135
ISSN: 1435-8115
1431-9276
DOI: 10.1017/s143192761301249x
Popis: The effects of polymer substrates on the interfacial structure and the thermal stability of Ga-doped ZnO (GZO) thin films were investigated. The GZO thin films were deposited on polyethylene terephthalate (PET) and polyethylene naphthalate (PEN) substrates by rf-magnetron sputtering at room temperature, and thermal stability tests of the GZO thin films on the polymer substrates were performed at 150°C up to 8 h in air. Electrical and structural characterizations of the GZO thin films on the PET and the PEN substrates were carried out, and the origins of the stable interfacial structure and the improved thermal stability of the GZO thin film on the PEN substrate were discussed.
Databáze: OpenAIRE