Radio frequency power sensor based on mems technology with ultra low loss
| Autor: | L.J. Fernandez, Jan Flokstra, Michael Curt Elwenspoek, Remco J. Wiegerink, J. Sese, Henri Jansen |
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| Přispěvatelé: | Faculty of Science and Technology |
| Rok vydání: | 2005 |
| Předmět: |
Microelectromechanical systems
Materials science business.industry METIS-228533 EWI-9914 Electrical engineering IR-54399 Radio frequency power transmission Line (electrical engineering) Transmission (telecommunications) Reflection (physics) Radio frequency Wideband business Sensitivity (electronics) |
| Zdroj: | 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005., 191-194 STARTPAGE=191;ENDPAGE=194;TITLE=18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. Scopus-Elsevier |
| Popis: | A wideband 100 kHz-4 GHz power sensor, of which the basic design was presented recently by L. J. Fernandez et al. (2004), was successfully realized. The sensor is based on sensing the electrical force between the RF signal line and a suspended membrane. Optimization of the design with SONNET has resulted in measured reflection losses (S11) less than -30 dB, transmission losses (SI2) better than -0.2 dB, and a sensitivity of 80 aF/mW. |
| Databáze: | OpenAIRE |
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