| Popis: |
Atomic force microscopy data reveal self-affine scaling of plasma polymer films. The rms surface roughness $\ensuremath{\sigma}$ increases with film thickness $\ensuremath{\tau}$ as $\ensuremath{\sigma}(fl{\ensuremath{\xi}}^{\ensuremath{-}1})\ensuremath{\sim}{\ensuremath{\tau}}^{\ensuremath{\beta}}$, and with measurement length $L$ as $\ensuremath{\sigma}(fg{L}^{\ensuremath{-}1}g{\ensuremath{\xi}}^{\ensuremath{-}1})\ensuremath{\sim}{L}^{\ensuremath{\alpha}}$, where $\ensuremath{\xi}$ is the surface roughness correlation length. At the deposition rate $R=2 \frac{\ensuremath{\mu}m}{h}$, the scaling exponents $\ensuremath{\alpha}$ and $\ensuremath{\beta}$ are 0.9 and 0.7, both increasing to 1 at $R=2 \frac{\ensuremath{\mu}m}{h}$. A competition between surface relaxation and deposition rate determine $\ensuremath{\alpha}$ and $\ensuremath{\xi}$, which increase rapidly with $R$ or inverse temperature. |
