Fabrication of AlN Nano-Structures Using Polarity Control by High Temperature Metalorganic Chemical Vapor Deposition
| Autor: | Daeyong Eom, Okhyun Nam, Jaedo Pyeon, Minhwan Jeon, Kyungjae Lee, Cheon Heo, Jinwan Kim |
|---|---|
| Rok vydání: | 2015 |
| Předmět: |
Fabrication
Morphology (linguistics) Materials science Aqueous solution Polarity (physics) Biomedical Engineering Bioengineering Nanotechnology General Chemistry Chemical vapor deposition Condensed Matter Physics Chemical engineering Etching (microfabrication) Nano General Materials Science Layer (electronics) |
| Zdroj: | Journal of Nanoscience and Nanotechnology. 15:5144-5147 |
| ISSN: | 1533-4899 1533-4880 |
| DOI: | 10.1166/jnn.2015.10368 |
| Popis: | This study investigates the crystallographic polarity transition of AIN layers grown by high temperature metalorganic chemical vapor deposition (HT-MOCVD), with varying trimethylaluminum (TMAI) pre-flow rates. AIN layers grown without TMAI pre-flow had a mixed polarity, consisting of Al- and N-polarity, and exhibited a rough surface. With an increasing rate of TMAI pre-flow, the AIN layer was changed to an Al-polarity, with a smooth surface morphology. Finally, AIN nano-pillars and nano-rods of Al-polarity were fabricated by etching a mixed polarity AIN layer using an aqueous KOH solution. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|