Large arrays and properties of 3-terminal graphene nanoelectromechanical switches
Autor: | J. Scott Bunch, Victor M. Bright, Harris J. Hall, Ji Won Suk, Martin L. Dunn, Rodney S. Ruoff, Narasimha Boddeti, Jason M. Gray, Charles T. Rogers, Luda Wang, Xinghui Liu, Lauren Cantley |
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Rok vydání: | 2013 |
Předmět: |
Nanoelectromechanical systems
Materials science Graphene business.industry Mechanical Engineering Nanotechnology Condensed Matter::Mesoscopic Systems and Quantum Hall Effect Finite element method law.invention Reliability (semiconductor) Mechanics of Materials law Microsystem Hardware_INTEGRATEDCIRCUITS Optoelectronics General Materials Science business Scaling Electromechanics Voltage |
Zdroj: | Advanced materials (Deerfield Beach, Fla.). 26(10) |
ISSN: | 1521-4095 |
Popis: | Large arrays of 3-terminal nanoelectromechanical graphene switches are fabricated. The switch is designed with a novel geometry that leads to low actuation voltages and improved mechanical integrity, while reducing adhesion forces, which improves the reliability of the switch. A finite element model including non-linear electromechanics is used to simulate the switching behavior and to deduce a scaling relation between the switching voltage and device dimensions. |
Databáze: | OpenAIRE |
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