High temperature plasma immersion ion implantation using hollow cathode discharges in small diameter metal tubes
| Autor: | Carla Silva, Mario Ueda, H. Reuther, Gelson B. de Souza, L. Pichon |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2019 |
| Předmět: |
Materials science
Alloy chemistry.chemical_element 02 engineering and technology engineering.material Thermal diffusivity 01 natural sciences law.invention Metal law 0103 physical sciences Materials Chemistry Electrical and Electronic Engineering Composite material Instrumentation 010302 applied physics Process Chemistry and Technology 021001 nanoscience & nanotechnology Plasma-immersion ion implantation Nitrogen Cathode Surfaces Coatings and Films Electronic Optical and Magnetic Materials Ion implantation chemistry visual_art engineering visual_art.visual_art_medium 0210 nano-technology Tin |
| Zdroj: | Journal of Vacuum Science & Technology B 37(2019)4, 042902 |
| Popis: | High temperature nitrogen plasma immersion ion implantation (HT-NPIII) method was used to treat the internal walls of small diameter metal tubes made of SS304 and of Ti6-Al4-V (TAV). Using a lid in one side of the tubes was essential to reach high temperatures of 700–900 °C, necessary for high thermal diffusion of nitrogen in Ti alloy samples placed inside the metal tubes for monitoring the HT-NPIII process. The used metal tubes also reached such high temperatures. New phases of TiN and Ti2N were successfully attained in the TAV samples with the treated layer thickness of more than 1.3 μm for all the tested cases. For tubes made of SS304, HT-NPIII treatments resulted in redeposition of FeN thick layers with high hardness on the surfaces of the internal walls of the tubes and on the monitoring samples. Obtaining such HT-NPIII conditions in these small metallic tubes was possible by achieving high plasma density through hollow cathode discharges inside those tubes. These results were compared to the ones obtained on the nitrogen implantation treatments of TAV samples in moderate to high temperatures carried out previously in the laboratory which indicated the superior performance of the presently reported method of surface modification.High temperature nitrogen plasma immersion ion implantation (HT-NPIII) method was used to treat the internal walls of small diameter metal tubes made of SS304 and of Ti6-Al4-V (TAV). Using a lid in one side of the tubes was essential to reach high temperatures of 700–900 °C, necessary for high thermal diffusion of nitrogen in Ti alloy samples placed inside the metal tubes for monitoring the HT-NPIII process. The used metal tubes also reached such high temperatures. New phases of TiN and Ti2N were successfully attained in the TAV samples with the treated layer thickness of more than 1.3 μm for all the tested cases. For tubes made of SS304, HT-NPIII treatments resulted in redeposition of FeN thick layers with high hardness on the surfaces of the internal walls of the tubes and on the monitoring samples. Obtaining such HT-NPIII conditions in these small metallic tubes was possible by achieving high plasma de... |
| Databáze: | OpenAIRE |
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