Estimation of an uncertainty budget and performance measurement for a dual‐wavelength Twyman‐Green interferometer

Autor:	Dahi Ghareab Abdelsalam Ibrahim
Rok vydání:	2021
Předmět:	0303 health sciences Histology Process (computing) 02 engineering and technology 021001 nanoscience & nanotechnology Statistical process control Pathology and Forensic Medicine Metrology 03 medical and health sciences Interferometry Wavelength Range (statistics) Performance measurement 0210 nano-technology Twyman–Green interferometer 030304 developmental biology Remote sensing Mathematics
Zdroj:	Journal of Microscopy. 282:224-238
ISSN:	1365-2818 0022-2720
Popis:	In this paper, the uncertainty budget from 10 sources we claim they have direct impact on measurement is estimated. The measurement has been applied to nominal step heights of 1.34 and 1.50 μm using a dual-wavelength Twyman-Green interferometer. Experimental results show that the measured step heights match with their nominal values with expanded uncertainty in the range of 5% from the object being measured. The performance of the measurement process over time has been estimated at different confidence levels and the obtained results show that the process is maintained in a state of statistical control. To the best of our knowledge, this is the first report for estimation of uncertainty budget from a synthetic wavelength.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::90b871a02af1cdb74de701c284ab44f7 https://doi.org/10.1111/jmi.12997 Zobrazit plný text záznamu Plný text ve formátu PDF Plný text ve formátu HTML
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