Autor: |
Sang Jung Ahn, Haiwon Lee, Chung Choo Chung, Cheolsu Han, Dal Hyun Kim, Ki Young Jung, Ji Sun Choi, Sukjong Bae |
Rok vydání: |
2006 |
Předmět: |
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Zdroj: |
Ultramicroscopy. 107(10-11) |
ISSN: |
0304-3991 |
Popis: |
Multi-walled carbon nanotube (CNT) tips were used in atomic force microscope (AFM) anodization lithography to investigate their advantages over conventional tips. The CNT tip required a larger threshold voltage than the mother silicon tip due to the Schottky barrier at the CNT-Si interface. Current-to-voltage curves distinguished the junction property between CNTs and mother tips. The CNT-platinum tip, which is more conductive than the CNT-silicon tip, showed promising results for AFM anodization lithography. Finally, the nanostructures with high aspect ratio were fabricated using a pulsed bias voltage technique as well as the CNT tip. |
Databáze: |
OpenAIRE |
Externí odkaz: |
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