Feasibility of multi-walled carbon nanotube probes in AFM anodization lithography

Autor:	Sang Jung Ahn, Haiwon Lee, Chung Choo Chung, Cheolsu Han, Dal Hyun Kim, Ki Young Jung, Ji Sun Choi, Sukjong Bae
Rok vydání:	2006
Předmět:	Nanostructure Materials science Silicon Anodizing Schottky barrier chemistry.chemical_element Nanotechnology Biasing Carbon nanotube Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials law.invention Threshold voltage chemistry law Instrumentation Lithography
Zdroj:	Ultramicroscopy. 107(10-11)
ISSN:	0304-3991
Popis:	Multi-walled carbon nanotube (CNT) tips were used in atomic force microscope (AFM) anodization lithography to investigate their advantages over conventional tips. The CNT tip required a larger threshold voltage than the mother silicon tip due to the Schottky barrier at the CNT-Si interface. Current-to-voltage curves distinguished the junction property between CNTs and mother tips. The CNT-platinum tip, which is more conductive than the CNT-silicon tip, showed promising results for AFM anodization lithography. Finally, the nanostructures with high aspect ratio were fabricated using a pulsed bias voltage technique as well as the CNT tip.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8fffe8d336e5eea13093a0f97a1f56f5 https://pubmed.ncbi.nlm.nih.gov/17604910 Zobrazit plný text záznamu Full Text from ScienceDirect