Micro-nanostructured interfaces fabricated by the use of inorganic block copolymer micellar monolayers as negative resist for electron beam lithography

Autor: Martin Möller, Joachim P. Spatz, Alexander Küller, Marco Arnold, Roman Glass, Jacques Blümmel
Jazyk: angličtina
Rok vydání: 2003
Předmět:
Zdroj: Advanced Functional Materials
Popis: This paper introduces an approach where the match of two different length scales, i.e., pattern from self-assembly of block copolymer micelles ( 50 nm), allow the grouping of nanometer-sized gold clusters in very small numbers in even aperiodic pattern and separation of these groups at length scales that are not accessible by pure self-assembly. Thus, we could demonstrate the grouping of Au nanoclusters in different geometries such as squares, rings, or spheres.
Databáze: OpenAIRE