Dielectric strength of parylene HT
Autor: | Rabih Khazaka, Sombel Diaham, M. Bechara, Rajesh Kumar, Marie-Laure Locatelli, Christophe Tenailleau |
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Přispěvatelé: | Matériaux Diélectriques dans la Conversion d’Energie (LAPLACE-MDCE), LAboratoire PLasma et Conversion d'Energie (LAPLACE), Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées, Centre interuniversitaire de recherche et d'ingenierie des matériaux (CIRIMAT), Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Institut de Chimie du CNRS (INC), Specialty Coating Systems - SCS (USA), Centre National de la Recherche Scientifique - CNRS (FRANCE), Institut National Polytechnique de Toulouse - INPT (FRANCE), Université Toulouse III - Paul Sabatier - UT3 (FRANCE), Institut National Polytechnique de Toulouse - Toulouse INP (FRANCE) |
Jazyk: | angličtina |
Rok vydání: | 2014 |
Předmět: |
Materials science
Dielectric strength Annealing (metallurgy) Matériaux Crystal structure General Physics and Astronomy Crystal growth Dielectric Dielectric thin films [CHIM.MATE]Chemical Sciences/Material chemistry Microstructure [SPI.MAT]Engineering Sciences [physics]/Materials Crystallography Spherulite Dielectric breakdown Dielectrics Crystallite Thin film Composite material Crystallization |
Zdroj: | Journal of Applied Physics Journal of Applied Physics, American Institute of Physics, 2014, vol. 115 (n° 5), pp.054102. ⟨10.1063/1.4863877⟩ |
ISSN: | 0021-8979 1089-7550 |
DOI: | 10.1063/1.4863877⟩ |
Popis: | International audience; The dielectric strength of parylene HT (PA-HT) films was studied at room temperature in a wide thickness range from 500 nm to 50 μm and was correlated with nano- and microstructure analyses. X-ray diffraction and polarized optical microscopy have revealed an enhancement of crystallization and spherulites development, respectively, with increasing the material thickness (d). Moreover, a critical thickness dC (between 5 and 10 μm) is identified corresponding to the beginning of spherulite developments in the films. Two distinct behaviors of the dielectric strength (FB ) appear in the thickness range. For d ≥ dC , PA-HT films exhibit a decrease in the breakdown field following a negative slope (FB ∼ d −0.4), while for d |
Databáze: | OpenAIRE |
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