Joule-Heated and Suspended Silicon Nanowire Based Sensor for Low-Power and Stable Hydrogen Detection
| Autor: | Dong-Il Moon, Yang-Kyu Choi, Inkyu Park, Jeonghoon Yun, Jae-Hyuk Ahn |
|---|---|
| Rok vydání: | 2019 |
| Předmět: |
Materials science
Hydrogen business.industry chemistry.chemical_element Joule 02 engineering and technology 010402 general chemistry 021001 nanoscience & nanotechnology 01 natural sciences 0104 chemical sciences chemistry.chemical_compound chemistry Etching (microfabrication) Physical vapor deposition Optoelectronics Deposition (phase transition) General Materials Science 0210 nano-technology business Silicon oxide Joule heating Carbon monoxide |
| Zdroj: | ACS Applied Materials & Interfaces. 11:42349-42357 |
| ISSN: | 1944-8252 1944-8244 |
| Popis: | We developed self-heated, suspended, and palladium-decorated silicon nanowires (Pd-SiNWs) for high-performance hydrogen (H2) gas sensing with low power consumption and high stability against diverse environmental noises. To prepare the Pd-SiNWs, SiNWs were fabricated by conventional complementary metal-oxide-semiconductor (CMOS) processes, and Pd nanoparticles were coated on the SiNWs by a physical vapor deposition method. Suspended Pd-SiNWs were simply obtained by etching buried oxide layer and Pd deposition. Joule heating of Pd-SiNW ( |
| Databáze: | OpenAIRE |
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