This article presents the results of gold deposition into pores of SiO $${}_{2}$$ /Si matrices and the modifications of the obtained SiO $${}_{2}$$ (Au)/Si systems by irradiation with argon Ar $${}^{+}$$ ions with an energy of 100 keV with a fluence of $$5\times 10^{14}$$ ion/cm $${}^{2}$$ . The effect of irradiation on changes in the surface topography of SiO $${}_{2}$$ (Au)/Si systems and the signal intensity of surface-enhanced Raman scattering during the detection of the model analyte (methylene blue) have been shown.
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