Qualitative and quantitative characterization of outgassing from SU-8
| Autor: | Jurriaan Schmitz, Cora Salm, Joost Melai, R.A.M. Wolters |
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| Rok vydání: | 2009 |
| Předmět: |
In situ
Work (thermodynamics) Structural material Chemistry METIS-263778 Analytical chemistry Condensed Matter Physics Mass spectrometry Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Characterization (materials science) Outgassing EWI-15223 SC-RID: Radiation Imaging detectors IR-62783 Electrical and Electronic Engineering |
| Zdroj: | Microelectronic engineering, 86(4-6):10.1016/j.mee.2008.11.008, 761-764. Elsevier |
| ISSN: | 0167-9317 |
| DOI: | 10.1016/j.mee.2008.11.008 |
| Popis: | SU-8 is often used as a structural material in Microsystems. In this work, the outgassing characteristics from such cross-linked SU-8 layers are studied using mass spectrometry and gas-chromatography techniques. With these methods the composition of the released matter can be identified, also the outgassing rate can be quantitatively characterized. A qualitative estimate of outgassing from SU-8 is given for cross-linked layers. The effect of hard-bakes is studied in situ by measuring at typical hard-bake temperatures. These tests indicate that a hard-bake is needed to provide good performance in UHV environments. Using gas-chromatography the outgassing rate from SU-8 is determined. The total outgassing rate is inversely proportional with time which further illustrates the effect of a hard-bake step. |
| Databáze: | OpenAIRE |
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