Real-Time Correction and Stabilization of Laser Diode Wavelength in Miniature Homodyne Interferometer for Long-Stroke Micro/Nano Positioning Stage Metrology
| Autor: | Kuang-Chao Fan, Baokai Feng, Yindi Cai, Qi Sang |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2019 |
| Předmět: |
0209 industrial biotechnology
Materials science Physics::Optics 02 engineering and technology lcsh:Chemical technology 01 natural sciences Biochemistry Article Displacement (vector) Analytical Chemistry Compensation (engineering) law.invention 010309 optics 020901 industrial engineering & automation Optics law 0103 physical sciences positioning stage lcsh:TP1-1185 Electrical and Electronic Engineering Instrumentation Temperature control Laser diode laser diode business.industry homodyne interferometer Atomic and Molecular Physics and Optics Metrology wavelength correction Wavelength Interferometry Direct-conversion receiver wavelength stabilization business |
| Zdroj: | Sensors, Vol 19, Iss 20, p 4587 (2019) Sensors Volume 19 Issue 20 Sensors (Basel, Switzerland) |
| ISSN: | 1424-8220 |
| Popis: | A low-cost miniature homodyne interferometer (MHI) with self-wavelength correction and self-wavelength stabilization is proposed for long-stroke micro/nano positioning stage metrology. In this interferometer, the displacement measurement is based on the analysis of homodyne interferometer fringe pattern. In order to miniaturize the interferometer size, a low-cost and small-sized laser diode is adopted as the laser source. The accuracy of the laser diode wavelength is real-time corrected by the proposed wavelength corrector using a modified wavelength calculation equation. The variation of the laser diode wavelength is suppressed by a real-time wavelength stabilizer, which is based on the principle of laser beam drift compensation and the principle of automatic temperature control. The optical configuration of the proposed MHI is proposed. The methods of displacement measurement, wavelength correction, and wavelength stabilization are depicted in detail. A laboratory-built prototype of the MHI is constructed, and experiments are carried out to demonstrate the feasibility of the proposed wavelength correction and stabilization methods. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
| Nepřihlášeným uživatelům se plný text nezobrazuje | K zobrazení výsledku je třeba se přihlásit. |