Time Evolution of Nucleation and Vertical Growth of Carbon Nanotubes during Plasma-Enhanced Chemical Vapor Deposition
| Autor: | Takamichi Hirata, Toshiaki Kato, Nobuhiko Satake, Rikizo Hatakeyama, Goo-Hwan Jeong, Kazuyuki Tohji |
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| Rok vydání: | 2003 |
| Předmět: |
Nanotube
Materials science Physics and Astronomy (miscellaneous) General Engineering Nucleation General Physics and Astronomy Nanotechnology Chemical vapor deposition Plasma Carbon nanotube Ion law.invention Condensed Matter::Materials Science Chemical engineering Plasma-enhanced chemical vapor deposition law Carbon nanotube supported catalyst |
| Zdroj: | Scopus-Elsevier |
| ISSN: | 0021-4922 |
| Popis: | We have investigated the time evolution during nanotube growth and proposed the growth mechanism in order to understand the effects of plasma properties on nanotube formation and controlled growth in the case of plasma-enhanced chemical vapor deposition. The nucleation process of multi-walled carbon nanotubes (MWNTs) firstly takes place through catalyst tip formation. MWNTs grow with a wide diameter distribution at the initial growth stage and finally attain similar diameters as growth proceeds. In addition, ion flux and bombardment energy need to be optimized during the nanotube growth for vertical alignment and a highly crystallized structure. |
| Databáze: | OpenAIRE |
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