NbTiN thin films deposited by hybrid HiPIMS/DC magnetron co-sputtering

Autor:	L. Del Giudice, Ayatollah Karimi, Rosendo Sanjines, S. Adjam, D. La Grange, O. Banakh
Předmět:	Materials science Analytical chemistry 02 engineering and technology 01 natural sciences Sputtering Electrical resistivity and conductivity 0103 physical sciences Materials Chemistry Electronic engineering Electrical measurements Thin film 010302 applied physics Optical properties NbTiN thin films HiPIMS Electrical resistivity Surfaces and Interfaces General Chemistry Dielectric function Nanoindentation Sputter deposition 021001 nanoscience & nanotechnology Condensed Matter Physics Surfaces Coatings and Films Cavity magnetron High-power impulse magnetron sputtering 0210 nano-technology DC magnetron sputtering
Popis:	Nb1 - xTixNy thin films (with 0
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::88b4b3aebd4b36769a68cb12da7fea75 https://infoscience.epfl.ch/record/219561 Zobrazit plný text záznamu