Tribological properties of hard a-C:H:F coatings
| Autor: | Pascal Tristant, Christelle Dublanche-Tixier, Maggy Colas, L. Kilman, E. Laborde, J.P. Lavoute, O. Jarry, Cédric Jaoul, Hélène Ageorges |
|---|---|
| Přispěvatelé: | Axe 2 : procédés de traitements de surface, Science des Procédés Céramiques et de Traitements de Surface (SPCTS), Université de Limoges (UNILIM)-Ecole Nationale Supérieure de Céramique Industrielle (ENSCI)-Institut des Procédés Appliqués aux Matériaux (IPAM), Université de Limoges (UNILIM)-Université de Limoges (UNILIM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université de Limoges (UNILIM)-Ecole Nationale Supérieure de Céramique Industrielle (ENSCI)-Institut des Procédés Appliqués aux Matériaux (IPAM), Université de Limoges (UNILIM)-Université de Limoges (UNILIM)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Sulzer Metaplas GmbH, Sulzer, Institut des Procédés Appliqués aux Matériaux (IPAM), Université de Limoges (UNILIM)-Université de Limoges (UNILIM)-Ecole Nationale Supérieure de Céramique Industrielle (ENSCI)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université de Limoges (UNILIM), SOREVI, Axe 3 : organisation structurale multiéchelle des matériaux (SPCTS-AXE3), Université de Limoges (UNILIM)-Université de Limoges (UNILIM)-Ecole Nationale Supérieure de Céramique Industrielle (ENSCI)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université de Limoges (UNILIM)-Institut des Procédés Appliqués aux Matériaux (IPAM) |
| Jazyk: | angličtina |
| Rok vydání: | 2013 |
| Předmět: |
Materials science
Hydrogen Analytical chemistry chemistry.chemical_element 02 engineering and technology engineering.material 01 natural sciences symbols.namesake Coating Plasma-enhanced chemical vapor deposition 0103 physical sciences Materials Chemistry Thin film 010302 applied physics Surfaces and Interfaces General Chemistry 021001 nanoscience & nanotechnology Condensed Matter Physics Surfaces Coatings and Films chemistry Amorphous carbon symbols engineering Fluorine DLC a-C:H:F Raman Wear Friction 0210 nano-technology Raman spectroscopy Carbon |
| Zdroj: | Surface and Coatings Technology Surface and Coatings Technology, Elsevier, 2013, 237, pp.28-332. ⟨10.1016/j.surfcoat.2013.07.042⟩ |
| ISSN: | 0257-8972 |
| Popis: | International audience; Hydrogenated amorphous carbon thin films containing fluorine (a-C:H:F) have been produced by radiofrequency plasma enhanced chemical vapor deposition by using different F/H ratios in the gas phase. The introduction of fluorine from 0 to 19 at.% resulted in a decrease of hydrogen content and to the formation of C\F and C\F2 bonds. For all the films, Raman analysis showed a typical diamond-like carbon response with an evolution of the structure to larger sp2 clusters with less hydrogen while fluorine content increased. The drop in hardness generally observed in the literature with fluorine introduction was less abrupt here: for a fluorine content up to 6.5 at.%, the measured hardness was 28 GPa, and for 19 at.% of fluorine, value was 20 GPa. These are quite high values for a-C:H:F thin films. Moreover, fluorine improved tribological behavior in dry conditions with friction coefficient slightly reduced at low fluorine content and wear rate significantly reduced: divided by two to four than the fluorine free reference coating. |
| Databáze: | OpenAIRE |
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