Fabrication of superhydrophobic and highly oleophobic silicon-based surfaces via electroless etching method
| Autor: | Rabah Boukherroub, Vincent Senez, Renaud Dufour, Yannick Coffinier, Thi Phuong Nhung Nguyen, Vincent Thomy |
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| Přispěvatelé: | Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF), Institut de Recherche Interdisciplinaire [Villeneuve d'Ascq] (IRI), Centre National de la Recherche Scientifique (CNRS)-Université de Lille, Droit et Santé-Université de Lille, Sciences et Technologies, The research was supported by theCentre National de la Recherche Scientifique (CNRS), the Nord-Pas-de-Calais Region through the 2008-2013 CIA State Region Planning contract, and by the Ministry of Defense., Université de Lille, Sciences et Technologies-Université de Lille, Droit et Santé-Centre National de la Recherche Scientifique (CNRS) |
| Jazyk: | angličtina |
| Rok vydání: | 2014 |
| Předmět: |
Materials science
Silicon superhydrophobic surfaces General Physics and Astronomy chemistry.chemical_element Nanotechnology Surfaces and Interfaces General Chemistry engineering.material Condensed Matter Physics Surface energy Surfaces Coatings and Films Contact angle chemistry.chemical_compound highly oleophobic surfaces chemistry Coating Chemical engineering Etching (microfabrication) Silanization engineering Fluoropolymer Sodium tetrafluoroborate silicon nanostructures non-wetting properties |
| Zdroj: | Applied Surface Science Applied Surface Science, Elsevier, 2014, 295, pp.38-43. ⟨10.1016/j.apsusc.2013.12.166⟩ Applied Surface Science, 2014, 295, pp.38-43. ⟨10.1016/j.apsusc.2013.12.166⟩ |
| ISSN: | 0169-4332 |
| DOI: | 10.1016/j.apsusc.2013.12.166⟩ |
| Popis: | This study reports on a simple method for the preparation of superhydrophobic and highly oleophobic nanostructured silicon surfaces. The technique relies on metal-assisted electroless etching of silicon in sodium tetrafluoroborate (NaBF4) aqueous solution. Then, silver particles were deposited on the obtained surfaces, changing their overall physical morphology. Finally, the surfaces were coated by either C4F8, a fluoropolymer deposited by plasma, or by SiOx overlayers chemically modified with 1H,1H,2H,2H-perfluorodecyltrichlorosilane (PFTS) through silanization reaction. All these surfaces exhibit a superhydrophobic character (large apparent contact angle and low hysteresis with respect to water). In addition, they present high oleophobic properties, i.e. a high repellency to low surface energy liquids with various contact angle hysteresis, both depending on the morphology and type of coating. |
| Databáze: | OpenAIRE |
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