Self-Controlled Constant-Current Temperature Stress for Triangular Voltage Sweep Measurements of Cu

Autor:	Gerald Beyer, Kristof Croes, Ivan Ciofi, Manuel Mannarino, Yunlong Li
Rok vydání:	2012
Předmět:	Materials science Analytical chemistry Constant current Composite material Temperature stress Voltage
Zdroj:	ECS Transactions. 41:113-123
ISSN:	1938-6737 1938-5862
Popis:	We present a new methodology for the characterization of Cu diffusion barriers, which is based on Triangular Voltage Sweep (TVS) measurements of Cu+ after Constant-Current Temperature Stress (CCTS). We show that CCTS-TVS measurements are effective for identifying defective Cu diffusion barriers. Finally, we discuss about mechanisms of Cu+ drift into dielectrics.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::875f6cba6cda36ef6adef5361c13cdd9 https://doi.org/10.1149/1.4717509 Zobrazit plný text záznamu