A miniaturized multiwire proportional chamber using CMOS wafer scale post-processing

Autor:	M. Chefdeville, Sander M. Smits, Jurriaan Schmitz, D. Altpeter, Cora Salm, Antonius A.I. Aarnink, J. Timmermans, V.M. Blanco Carballo, Jan Visschers, H. Der Graaf
Jazyk:	angličtina
Rok vydání:	2006
Předmět:	Physics Wire chamber business.industry Detector Electrical engineering High voltage CMOS Hardware_GENERAL Microsystem Electrode Process integration SC-RID: Radiation Imaging detectors Wafer business
Zdroj:	Proceedings of 32nd European Solid State Device Research Conference, 129-132 STARTPAGE=129;ENDPAGE=132;TITLE=Proceedings of 32nd European Solid State Device Research Conference
ISSN:	1930-8876
DOI:	10.1109/essder.2006.307655
Popis:	This paper presents the technology of a new microsystem consisting of a CMOS chip with integrated high voltage electrodes, to be used as a detector for ionizing radiation. Its application ranges from particle detection in nuclear and high-energy physics to X-ray detection for materials research and medical purposes. In this paper, the process integration is detailed and system trade-off considerations are reported.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8686c4e8cdad0d24b874f20bbacca160 https://doi.org/10.1109/essder.2006.307655 Zobrazit plný text záznamu