Theoretical study toward rationalizing inelastic background analysis of buried layers in XPS and HAXPES
| Autor: | Sven Tougaard, C. Zborowski |
|---|---|
| Přispěvatelé: | Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), INL - Matériaux Fonctionnels et Nanostructures (INL - MFN), Institut des Nanotechnologies de Lyon (INL), École Centrale de Lyon (ECL), Université de Lyon-Université de Lyon-Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-École Supérieure de Chimie Physique Électronique de Lyon (CPE)-Institut National des Sciences Appliquées de Lyon (INSA Lyon), Université de Lyon-Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS)-École Centrale de Lyon (ECL), Université de Lyon-Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS), University of Southern Denmark (SDU) |
| Rok vydání: | 2019 |
| Předmět: |
Materials science
inelastic scattering cross section Surfaces and Interfaces General Chemistry Condensed Matter Physics Inelastic mean free path Molecular physics Surfaces Coatings and Films QUASES-Tougaard X-ray photoelectron spectroscopy inelastic background analysis buried layers Background analysis XPS Materials Chemistry HAXPES inelastic mean free path [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics |
| Zdroj: | Surface and Interface Analysis Surface and Interface Analysis, 2019, 51 (8), pp.857-873. ⟨10.1002/sia.6660⟩ Zborowski, C & Tougaard, S M 2019, ' Theoretical study toward rationalizing inelastic background analysis of buried layers in XPS and HAXPES ', Surface and Interface Analysis, vol. 51, no. 8, pp. 857-873 . https://doi.org/10.1002/sia.6660 |
| ISSN: | 1096-9918 0142-2421 |
| DOI: | 10.1002/sia.6660 |
| Popis: | International audience; The approach of inelastic background analysis was previously demonstrated to be a useful tool for retrieving the depth distribution of buried layers with an accuracy, which is better than 5% even for some complex samples. This paper presents a study that attempt at rationalizing the approach by exploring how to make the best choice of the inelastic mean free path and the inelastic scattering cross section, which are the two main input parameters needed in the analysis. To this end, spectra from buried layers were created with Quases-Generate software. The layers consisted of Si 1s recorded at 6099 eV and Au 4d recorded at 1150 eV kinetic energy buried under overlayers of Si, Au, Al, polymer, or Ta. Spectra from samples with a wide range of buried layer thickness and overlayer thickness were created. Subsequently, these spectra were analyzed with Quases-Analyze software and for each case the analysis was done with different combinations of the input parameters. Among these, the best choice for all cases was to use an effective IMFP and effective inelastic scattering cross section with relative weights being half the thickness of the buried layer and the full thickness of the overlayer. This general formula together with a new version of the software makes the inelastic background analysis of buried layers faster and easier to apply even for nonspecialists. |
| Databáze: | OpenAIRE |
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