Experimental Characterization of an Embossed Capacitive Micromachined Ultrasonic Transducer Cell
| Autor: | Xin Liu, Sio Hang Pun, Kin Fong Lei, Ching-Hsiang Cheng, Peng Un Mak, Jiujiang Wang, Yuanyu Yu, Mang I Vai, Shuang Zhang |
|---|---|
| Rok vydání: | 2020 |
| Předmět: |
Operational performance
Materials science lcsh:Mechanical engineering and machinery Capacitive sensing 02 engineering and technology output pressure Collapse mode 01 natural sciences Article Die (integrated circuit) Capacitive micromachined ultrasonic transducers 0103 physical sciences collapse mode lcsh:TJ1-1570 Electrical and Electronic Engineering 010301 acoustics business.industry Mechanical Engineering 021001 nanoscience & nanotechnology capacitive micromachined ultrasonic transducer (CMUT) Control and Systems Engineering embossed CMUT Electrode Optoelectronics Ultrasonic sensor 0210 nano-technology business Voltage |
| Zdroj: | Micromachines Volume 11 Issue 2 Micromachines, Vol 11, Iss 2, p 217 (2020) |
| ISSN: | 2072-666X |
| DOI: | 10.3390/mi11020217 |
| Popis: | Capacitive Micromachined Ultrasonic Transducer (CMUT) is a promising ultrasonic transducer in medical diagnosis and therapeutic applications that demand a high output pressure. The concept of a CMUT with an annular embossed pattern on a membrane working in collapse mode is proposed to further improve the output pressure. To evaluate the performance of an embossed CMUT cell, both the embossed and uniform membrane CMUT cells were fabricated in the same die with a customized six-mask sacrificial release process. An annular nickel pattern with the dimension of 3 &mu m × 2 &mu m (width × height) was formed on a full top electrode CMUT to realize an embossed CMUT cell. Experimental characterization was carried out with optical, electrical, and acoustic instruments on the embossed and uniform CMUT cells. The embossed CMUT cell achieved 27.1% improvement of output pressure in comparison to the uniform CMUT cell biased at 170 V voltage. The fractional bandwidths of the embossed and uniform CMUT cells were 52.5% and 41.8%, respectively. It substantiated that the embossed pattern should be placed at the vibrating center of the membrane for achieving a higher output pressure. The experimental characterization indicated that the embossed CMUT cell has better operational performance than the uniform CMUT cell in collapse region. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|