Ion energy and angular distributions in low-pressure capacitive oxygen RF discharges driven by tailored voltage waveforms
| Autor: | Aranka Derzsi, Máté Vass, Satoshi Hamaguchi, Zoltan Donko, Edmund Schuengel, Julian Schulze |
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| Jazyk: | angličtina |
| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Materials science Capacitive sensing FOS: Physical sciences Condensed Matter Physics Kinetic energy 01 natural sciences Physics - Plasma Physics 010305 fluids & plasmas Ion Plasma Physics (physics.plasm-ph) Physics::Plasma Physics 0103 physical sciences Electrode Particle Atomic physics Excitation Ion transporter Voltage |
| Popis: | We investigate the energy and angular distributions of the ions reaching the electrodes in low-pressure, capacitively coupled oxygen radio-frequency discharges. These distributions, as well as the possibilities of the independent control of the ion flux and the ion energy are analysed for different types of excitation: single- and classical dual-frequency, as well as valleys- and sawtooth-type waveforms. The studies are based on kinetic, particle-based simulations that reveal the physics of these discharges in great details. The conditions cover weakly collisional to highly collisional domains of ion transport via the electrode sheaths. Analytical models are also applied to understand the features of the energy and angular distribution functions. |
| Databáze: | OpenAIRE |
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