Microwave reflectometry : a high-resolution technique for measuring vibration of capacitive microresonators
| Autor: | Didier Theron, Benjamin Walter, Damien Ducatteau, Hassan Tanbakuchi, Bernard Legrand |
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| Přispěvatelé: | Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF) |
| Jazyk: | angličtina |
| Rok vydání: | 2013 |
| Předmět: | |
| Zdroj: | Proceedings of 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013, 2013, Barcelona, Spain. paper M3P.140, 566-569, Outstanding poster presentation award nomination, ⟨10.1109/Transducers.2013.6626829⟩ |
| DOI: | 10.1109/Transducers.2013.6626829⟩ |
| Popis: | The paper proposes a novel technique for measuring the vibration of capacitive microelectromechanical resonators. Based on microwave reflectometry in the gigahertz range, the technique offers signal-to-noise ratio greater than 100 dB for the studied device and it rejects any parasitic crosstalk due to stray capacitances. Experiments demonstrate that amplitude resolution better than 10 fm/√Hz is achieved, which competes with standard optical interferometry. The technique is particularly appropriate for electrical characterization of MEMS devices but also for signal processing of resonant sensors when large-bandwidth, high signal-to-noise ratio and fully electrical detection is required. |
| Databáze: | OpenAIRE |
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