OPTIMIZATION OF MANUFACTURING OF LOGICAL ELEMENTS 'AND' MANUFACTURED BY USING FIELD-EFFECT HETEROTRANSISTOR TO DECREASE THEIR DIMENSIONS

Autor: E.L. Pankratov, E.A. Bulaeva
Rok vydání: 2015
Předmět:
DOI: 10.5281/zenodo.3477800
Popis: In this paper we introduce an approach to decrease dimensions of logical elements "AND" based on fieldeffect heterotransistors. Framework the approach one shall consider a heterostructure with specific structure. Several specific areas of the heterostructure should be doped by diffusion or ion implantation. Both types of doping should be optimized.
Databáze: OpenAIRE