OPTIMIZATION OF MANUFACTURING OF LOGICAL ELEMENTS 'AND' MANUFACTURED BY USING FIELD-EFFECT HETEROTRANSISTOR TO DECREASE THEIR DIMENSIONS
Autor: | E.L. Pankratov, E.A. Bulaeva |
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Rok vydání: | 2015 |
Předmět: | |
DOI: | 10.5281/zenodo.3477800 |
Popis: | In this paper we introduce an approach to decrease dimensions of logical elements "AND" based on fieldeffect heterotransistors. Framework the approach one shall consider a heterostructure with specific structure. Several specific areas of the heterostructure should be doped by diffusion or ion implantation. Both types of doping should be optimized. |
Databáze: | OpenAIRE |
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