Autor:	N. F. de Rooij, M.-A. Grétillat, V.P. Jaecklin, R. Baettig, P. Vogel, Cornel Marxer, O. Anthamatten
Rok vydání:	1996
Předmět:	Surface micromachining Optics Optical modulator Materials science business.industry Metals and Alloys Electro-optic modulator Electrical and Electronic Engineering Condensed Matter Physics business Instrumentation Surfaces Coatings and Films Electronic Optical and Magnetic Materials
Zdroj:	Sensors and Actuators A: Physical. 52:46-50
ISSN:	0924-4247
DOI:	10.1016/0924-4247(96)80124-5
Popis:	Note: 152 Reference SAMLAB-ARTICLE-1996-008 Record created on 2009-05-12, modified on 2016-08-08
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::83a6d43c9e99b19978eae2435e30ed5a https://doi.org/10.1016/0924-4247(96)80124-5 Zobrazit plný text záznamu Full Text from ScienceDirect