SMD pressure and flow sensor for compressed air in LTCC technology with integrated electronics
| Autor: | Peter Ryser, Nicolas Craquelin, Thomas Maeder, G. Boutinard Rouelle, Yannick Fournier |
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| Předmět: |
Materials science
Cantilever Chemistry(all) LTCC Pressure sensor Compressed air Couches épaisses ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION ComputerApplications_COMPUTERSINOTHERSYSTEMS integrated sensor SMD mounting Multisensor pressure low force sensor medicine 3D structured beam Thick film technology Ceramic Signal conditioning business.industry Structuration 3D Stiffness temperature Débitmètre General Medicine 3D structuration Piezoresistive effect visual_art piezoresistive bridge flow Capteur de pression visual_art.visual_art_medium Chemical Engineering(all) Optoelectronics Flow sensor medicine.symptom business Beam (structure) Thick-film technology Multicapteur |
| Popis: | In this work, we present an integrated flow / pressure / temperature multisensor in LTCC (low- temperature co-fired ceramic) technology designed for diagnostics monitoring of standard industrial compressed air circuits and devices, such as valves and actuators. The pressure sensor is based on a membrane carrying a thick-film piezoresistive Wheatstone bridge. Flow is sensed using the constant- temperature anemometric principle, with the sensing thermistors placed in a fluidics channel, which also comprises similar thermistors for temperature sensing. All three sensors are integrated into a single surface-solderable LTCC unit, with the solder fulfilling the roles of mechanical fastening, electrical connectivity and fluidic sealing. In this work, the flow-sensing part is demonstrated, and possible improvements in efficiency outlined. Key words: multisensors, flow, pressure, temperature, LTCC |
| Databáze: | OpenAIRE |
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