Real-time imaging of surface evolution driven by variable-energy ion irradiation
| Autor: | Ivan Petrov, Steve Burdin, M. Ondrejcek, M. Rajappan, C. P. Flynn, W. Swiech, Ernie Sammann |
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| Rok vydání: | 2008 |
| Předmět: |
Anions
Silicon Range (particle radiation) Radiation Chemistry Image Enhancement Atomic and Molecular Physics and Optics Ion source Electronic Optical and Magnetic Materials Ion Microscopy Electron Low-energy electron microscopy Ion beam deposition Sputtering Irradiation Atomic physics Instrumentation |
| Zdroj: | Ultramicroscopy. 108:646-655 |
| ISSN: | 0304-3991 |
| DOI: | 10.1016/j.ultramic.2007.10.005 |
| Popis: | We describe the design of a tandem instrument combining a low-energy electron microscope (LEEM) and a negative ion accelerator. This instrument provides video rate imaging of surface microtopography and the dynamics of its evolution during irradiation by energetic ions, at temperatures up to 1700 K. The negative ion beam is incident on the sample at normal incidence with impact energies selectable in the range 0-5 keV, and with current densities up to 30 muA/cm2 ( approximately 2 x 10(14)ions/cm2 s or approximately 0.2 ML/s). The LEEM operates at a base pressure in the 10(-9)Pa range. We describe the design and operating principles of the instrument and present examples of Pt(111) and Si(001) self-ion irradiation experiments. |
| Databáze: | OpenAIRE |
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