| Autor: |
Angel T-H. Lin, Ashwin A. Seshia, Jize Yan |
| Rok vydání: |
2009 |
| Předmět: |
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| Zdroj: |
2009 IEEE International Ultrasonics Symposium. |
| DOI: |
10.1109/ultsym.2009.5441572 |
| Popis: |
This paper demonstrates the suppression of parasitic resonance in a piezoresistively transduced [1–3] longitudinal mode MEMS resonator, wherein beams are electrostatically excited in a combined extensional mode with an associated frequency-Q product of 3.28 × 1012. The response of the beam is sensed using both capacitive and piezoresistive transduction principles. The resonator consists of six parallel beams linked to a central anchor and a pair of symmetrical parallel beams that force the beams to vibrate in-phase. The mode suppression in the resonator is compared with other structures by finite element analysis (FEA). The relative distribution of strain energies in both the resonant structure and anchors [5] and in both primary and secondary directions of vibration are proposed as figures of merit to compare this device to previously reported longitudinal mode beam resonators [2,4,6,7]. The design optimization of longitudinal mode beam resonators is also discussed. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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