Optimization of CMOS MEMS microwave power sensors

Autor:	C. Zincke, Michael Gaitan, M. Hopcroft, Mona Zaghloul, V. Milanovic
Rok vydání:	2003
Předmět:	Microelectromechanical systems CMOS Thermocouple Computer science Thermal Thermoelectric effect Electronic engineering Sensitivity (control systems) Microwave Power (physics)
Zdroj:	ISCAS (5) Scopus-Elsevier
DOI:	10.1109/iscas.1999.777531
Popis:	To improve sensitivity and signal-to-noise ratio, while maintaining microwave performance, several design parameters must be considered, such as the number and placement of thermocouples. This paper presents experimental and analytical thermal characterization of the sensors, which provides insight into the proper adjustment of the layout parameters. Experimental results were obtained by indirect measurements of the sensor temperature distribution under various applied power conditions. A simple and approximate model was developed, and adjusted based on experimental results, which was then used to show the effects of the variations in layout parameters on the overall device sensitivity. The model includes thermoelectric Peltier and Thomson effects.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_dedup___::828d6f301e17c5e63af7d264d11eb416 https://doi.org/10.1109/iscas.1999.777531 Zobrazit plný text záznamu