High aspect ratio diamond microelectrode array for neuronal activity measurements
| Autor: | Philippe Bergonzo, Christine Mer, Gaelle Lissorgues, Samuel Saada, Mathias Bonnauron, Lionel Rousseau |
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| Přispěvatelé: | Laboratoire Capteurs Diamant (LCD-LIST), Département Métrologie Instrumentation & Information (DM2I), Laboratoire d'Intégration des Systèmes et des Technologies (LIST), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Paris-Saclay-Laboratoire d'Intégration des Systèmes et des Technologies (LIST), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Paris-Saclay, Electronique, Systèmes de communication et Microsystèmes (ESYCOM), Conservatoire National des Arts et Métiers [CNAM] (CNAM)-Université Paris-Est Marne-la-Vallée (UPEM)-ESIEE Paris, J. Robertson, H. Kawarada, E. Kohn, Z. Sitar, European Project: 36222,DREAMS, Laboratoire d'Intégration des Systèmes et des Technologies (LIST (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Paris-Saclay-Laboratoire d'Intégration des Systèmes et des Technologies (LIST (CEA)), Conservatoire National des Arts et Métiers [CNAM] (CNAM), HESAM Université - Communauté d'universités et d'établissements Hautes écoles Sorbonne Arts et métiers université (HESAM)-HESAM Université - Communauté d'universités et d'établissements Hautes écoles Sorbonne Arts et métiers université (HESAM)-Université Paris-Est Marne-la-Vallée (UPEM)-ESIEE Paris |
| Jazyk: | angličtina |
| Rok vydání: | 2007 |
| Předmět: |
Materials science
electrochemical stability Synthetic diamond Nucleation Nanotechnology 02 engineering and technology Chemical vapor deposition engineering.material 010402 general chemistry 01 natural sciences law.invention optical transparency [SPI.MAT]Engineering Sciences [physics]/Materials diamond law Materials Chemistry Deep reactive-ion etching bio inertness Electrical and Electronic Engineering Reactive-ion etching [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics [SDV.IB.BIO]Life Sciences [q-bio]/Bioengineering/Biomaterials Mechanical Engineering BEN Nanocrystaline Diamond Diamond General Chemistry Multielectrode array 021001 nanoscience & nanotechnology biosensors Microwave Plasma Chemical Vapor Deposition 0104 chemical sciences Electronic Optical and Magnetic Materials microelectrode [SPI.TRON]Engineering Sciences [physics]/Electronics Microelectrode [SPI.ELEC]Engineering Sciences [physics]/Electromagnetism Chemical Vapor Deposition Microelectrode arrays engineering conductivity 0210 nano-technology Deep Reactive Ion Etching |
| Zdroj: | Diamond and Related Materials Diamond 2007, the 18th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides and Silicon Carbide Diamond 2007, the 18th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides and Silicon Carbide, Sep 2007, Berlin, Germany. pp.1399-1404, ⟨10.1016/j.diamond.2007.12.065⟩ |
| DOI: | 10.1016/j.diamond.2007.12.065⟩ |
| Popis: | International audience; Diamond exhibits several attractive properties for bio-sensing applications. In particular its high bio inertness, high electrochemical stability, and optical transparency provide diamond with high interests for neural activity study. The purpose of this study is the realisation of microelectrodes arrays (MEA) in diamond for neurons slices study. Due to a cellular lysis on the edge of the tissue slices studied, electrodes have to be at least 60 μm in height even though the electrode surface has to be minimised in order to achieve good signal noise rate. Silicon MEA with metal contacts were realised using (Deep Reactive Ion Etching) DRIE and coated with Nanocrystaline Diamond (NCD) using (Bias Enhanced Nucleation) BEN technique. We focus the study on the understanding of the BEN nucleation process on such high aspect ratio electrodes. Several parameters such as slope of the substrate, conductivity and chemical nature of the substrate were studied in order to enable selective nucleation necessary to fabricate diamond MEAs. The study leads to the optimised development of a processing route enabling the selective coating of the active tips of high aspect ratio MEAs without altering the electrical insulation between probes. |
| Databáze: | OpenAIRE |
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