Novel roll-to-roll lift-off patterned active-matrix display on flexible polymer substrate
| Autor: | Cheng-Yao Lo, Harri Kopola, Jukka Hast, Hiroshi Toshiyoshi, Olli-Heikki Huttunen, Arto Maaninen, Hiroyuki Fujita, Jarno Petäjä, Johanna Hiitola-Keinänen |
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| Jazyk: | angličtina |
| Rok vydání: | 2009 |
| Předmět: |
Microelectromechanical systems
Materials science Fabry-Perot Nanotechnology Condensed Matter Physics Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Active matrix law.invention Roll-to-roll processing MEMS Nanolithography Flexible display law Flexography visual_art Roll-to-roll visual_art.visual_art_medium Polymer substrate Electrical and Electronic Engineering Embossing |
| Zdroj: | Lo, C-Y, Hiitola-Keinänen, J, Huttunen, O-H, Petäjä, J, Hast, J, Maaninen, A, Kopola, H, Fujita, H & Toshiyoshi, H 2009, ' Novel roll-to-roll lift-off patterned active-matrix display on flexible polymer substrate ', Microelectronic Engineering, vol. 86, no. 4-6, pp. 979-983 . https://doi.org/10.1016/j.mee.2009.02.001 |
| Popis: | A novel electrode patterning technique by using lift-off a sacrificial black ink layer on thin polymer substrate was performed on a roll-to-roll (reel-to-reel, R2R) printing system. An active-matrix display array was demonstrated by this technique with 2000@mm display pixels with concept of MEMS (micro electro mechanical system) etalon. The resolution of this flexography lift-off system was improved to 100@mm for pattern isolation from gravure printing. Compare to well-developed hot embossing or laser ablation for polymer substrate's patterning, R2R lift-off provides a flat and smooth surface which is a must for multilayer stacking and reliability. This system also provides a high pattern integrity, low cost, large scale, and high throughput solution for electrode patterning on flexible polymer substrate. |
| Databáze: | OpenAIRE |
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